DescriptionAn atom probe tomography characterization of gas atomized powder particles of a Cu47Ti33Zr11Ni8Si1 metallic glass has been performed. The needle-shaped specimens required for the local electrode atom probe were fabricated from individual 10–40 mm diameter particles with the use of a dual beam focused ion beam miller. Details of the multiphase microstructure of the as-atomized powder and the devitrified powder after different annealing treatments below and above the glass transition and crystallization temperature are presented.